Products
| LTD PART No. | DESCRIPTION | OEM No. |
| 10052-00 | BELL JAR | 0200-00525/0040-21178 |
| 10053-000 | PIN, COVER RF SCREW VECTRA IMP | 0200-20216 REV |
| 10065-000 | INSULATOR | Modifier 0200-00221 / PT-0643-0023 |
| 10066-000 | INSULATOR | 0200-20426 REV 001 / PT-0643-0002 |
| 10110-000 | WINDOW 4MM APERTURE RECESSED ENDPOINT | 0200-35801 REV 001 |
| 10118-000 | WINDOW 6MM APERTURE RECESSED ENDPOINT | 0200-10133 REV 001 |
| 10120-000 | SHADOW RING | 0200-10176 REV 003 |
| 10122-000 | DEPOSITION RING | 0200-00674 REV 3 |
| 10123-000 | DEPOSITION RING | 0200-01155 REV 1 |
| 10127-000 | 0200-35783 | |
| 10128-000 | Shadow Ring, Quartz, 200mm Notch | 0200-36696 |
| 10130-000 | STEP COVER RING | 0200-09789 |
| 10131-000 | WINDOW RECESSED ENDPOINT | 0200-09657 |
| 10134-000 | INSULATOR | 0200-20459 |
| 10135-000 | cover plate | 0200-36631 |
| 10136-000 | ceramic pin | 0200-10284 |
| 10137-000 | ceramic deposition ring (COVER RING 8″) | 0200-20331 / PT-0243-0029 |
| 10138-000 | Insulator Quartz 200mm | 0200-10073 |
| 10140-000 | GDP Quartz | 0200-00410 |
| 10141-000 | Quartz Tube | 0200-00148 |
| 10149-000 | SHADOW RING | 0200-76068 |
| 10150-000 | Ring | 0200-40194 |
| 10151-000 | Collar | 0200-40211 |
| 10152-000 | Baffle | 0200-40209 |
| 10153-000 | Dome | 0200-40218 |
| 10154-000 | Liner | 0200-40158 |
| 10155-000 | Cover | 0200-40131 |
| 10156-000 | Insert | 0200-40091 |
| 10157-000 | Shaft | 0200-40222 |
| 10158-000 | Shaft | 0200-40221 |
| 10159-000 | Pin | 0200-40156 |
| 10164-000 | Plate | 0200-10555 |
| 10165-000 | Ring | 0200-00295 |
| 10166-000 | Insert | 0200-10549 |
| 10167-000 | Baffle | 0200-40208 |
| 10168-000 | Shadow ring | 0200-10445 |
| 10170-000 | Window Heater | 0200-09074 or 10051805 |
| 10173-000 | Pin Lift Heater | 0200-10284 |
| 10184-000 | Cover plate | 0200-36630 |
| 10189-000 | ceramic ring | 0200-10169 rev b |
| 10191-000 | Cap Rigid Coil Support | 0200-20170 |
| 10193-000 | pin wafer lift | 0200-35207 |
| 10194-000 | Chamber liner | 0200-35161-B |
| 10197-000 | Labyrinth | 0200-20175 |
| 10199-000 | upper pedestal cover dep. Ring 8″ | 0200-20285 |
| 10201-000 | Rest Button | 0200-20315 pt-0243-0031 |
| 10226-000 | Sapphire Window | 0200-09969 |
| 10232-000 | Shadow ring | 0200-01284 |
| 10233-000 | Shadow ring | 0200-00828 |
| 10234-000 | Insulator 300mm emax | 0200-00831 |
| 10235-000 | Cap top 300mm | 0200-00761 |
| 10236-000 | Gas Distribution Plate | 0200-01003 |
| 10237-000 | liner side | 0200-00762 |
| 10238-000 | Single Ring | 0200-00981 |
| 10239-000 | Insulator 300mm | 0200-36034 |
| 10240-000 | Focus Ring 8″ 209mm ID Notch Life MX | 0200-09787 |
| 10241-000 | Cover Ring | 0200-09911 Modified |
| 10242-000 | Gas Distribution Plate | 0200-10246 |
| 10244-000 | Insulator | 0200-00221 |
| 10245-000 | Bushing | 0200-00340 PT-0243-0024 |
| 10248-000 | Silicon Insert Ring | 0200-00829-002-621-034-1 |
| 10250-000 | Labyrinth | 0200-20217 |
| 10251-000 | Insulator ceramic | 0200-20169 |
| 10252-000 | Housing Ceramic | 0200-20215 |
| 10255-000 | Shaft, Wafer Lift 200mm | 0200-35424 Rev D |
| 10256-000 | Shaft, Susceptor \Support | 0200-35573 Rev D |
| 10267-000 | cover plate modified | 0200-00218 Modified |
| 10269-000 | Insulator 300mm | 0200-01903(10286786) |
| 10298-000 | Ring Single | 0200-36689 |
| 10299-000 | Cover Quartz ESC NGDT (2 Flats) | 0200-09977 similar to 10446-000 |
| 10300-000 | pipe insulating QTZ ESC | 0200-09603 |
| 10350-000 | Base plate | 0200-40131 or 0200-50124 |
| 10351-000 | viewport window | 0200-00934 |
| 10377-000 | Gas Tube | 0200-09025 |
| 10378-000 | Plate, Edge Cover, DxZ | 0200-10169 |
| 10383-000 | Gas Feed Tube OD 6.35 BWCVD | 0200-09450 |
| 10385-000 | Door Preclean chmber | 0200-20001 |
| 10386-000 | Lower Shield | 0200-20003 |
| 10390-000 | CVD Chamber Slit Window | 0200-09964 |
| 10391-000 | Ceramic, C Shape Ring | 0200-36415 |
| 10392-000 | Ceramic, Bottom Pumping Plate | 0200-36416 |
| 10393-000 | Ceramic, Top Pumping Plate | 0200-36417 |
| 10394-000 | Ceramic, Pumping Channel Cover | 0200-36418 |
| 10395-000 | focus ring | 0200-09787 |
| 10395-010 | Focus Ring (Shortened by .500”) | 0200-09787 |
| 10395-020 | Focus Ring, Roughened | 0200-09787 |
| 10396-000 | Insert Ring, Silicon, 200mm Notch | 0200-10446 |
| 10397-000 | Dome | 0200-39137 |
| 10398-000 | Focus Ring | 0200-39140 |
| 10399-000 | Capture Ring | 0200-35323 |
| 10400-000 | Gas Feed Housing | 0200-35290 |
| 10401-000 | Gas Feed Inserts | 0200-35291 |
| 10402-000 | Endpoint Window | 0200-35292 |
| 10403-000 | Manometer Window | 0200-35293 |
| 10419-000 | INSULATOR 6” | 0200-01172 Rev 002 |
| 10420-000 | COVER | 0200-01176 Rev 002 |
| 10421-000 | Window | 0200-09158 |
| 10427-000 | Lift Pin | 0200-09716 |
| 10437-000 | Capture Ring | 0200-10377 |
| 10438-000 | Window, Lower Chamber | 0200-35294 |
| 10439-000 | Gas Feed Housing | 0200-35295 |
| 10440-000 | Gas Feed Inserts | 0200-35296 |
| 10441-000 | Dome IEP | 0200-35956 |
| 10442-000 | Window, Sapphire IEP | 0200-35957 |
| 10443-000 | Aperature, Ceramic, AEP | 0200-39296 |
| 10445-000 | Cap 8 ESC Quartz | 0200-09785 |
| 10446-000 | Cover Ring QTZ 200mm High Profile Notch | 0200-09606 similar to 10299-000 |
| 10452-000 | Gas Dist. Plate 8.5″ O.D. | 0200-09201 |
| 10453-000 | QTZ. Liner ASP lower gas dist. | 0200-36682 |
| 10454-000 | QTZ. Liner ASP upper gas dist. | 0200-36680 |
| 10455-000 | QTZ top cap 25mm tube ASP | 0200-09444 |
| 10456-000 | Pipe insulating lift ESC | 0200-09782 |
| 10463-000 | GDP Middle 5 Hole | 0200-09478 |
| 10464-000 | Tube Applicator | 0200-00149 |
| 10470-000 | 6″ ceramic wafer | 0200-10007 |
| 10473-000 | Rough Dome | 0200-10324 |
| 10474-000 | Rough Focus Ring | 0200-00137 |
| 10475-000 | Manometer Port Window | 0200-39135 |
| 10476-000 | Inner Tube | 0200-39133 |
| 10477-000 | Window, Sapphire, Endpoint | 0200-39134 |
| 10478-000 | Window, Sapphire, Viewport | 0200-36461 |
| 10489-000 | rear quartz shield | 0200-03387 |
| 10490-000 | Ring | 0200-00602 |
| 10491-000 | Sleeve application Sappire | 0200-10387 |
| 10494-000 | Ring Single | 0200-36692 |
| 10495-000 | quartz ring | 0200-00602 |
| 10511-000 | Dome Lower | 0200-35042 |
| 10512-000 | Insert QTZ. Inject 2 zone | 0200-35916 |
| 10513-000 | insert QTZ Exhaust | 0200-35018 |
| 10514-000 | Baffle inject 3 zone | 0200-35159 |
| 10546-000 | SHIELD,150MM CERAMIC,WXZ | 0200-09121 |
| 10554-000 | SHIELD LOWER, PCI QUARTZ | 0200-20005 |
| 10555-000 | INSULATOR, PCI QUARTZ | 0200-20002 |
| 10559-000 | Shadow ring | 0200-00621 |
| 10560-000 | window | 0200-09074 special material |
| 10569-000 | insulator | 0200-00221 mod |
| 10587-000 | dome upper | 0200-35084 |
| 10588-000 | inject insert | 0200-35917 |
| 10594-000 | 8″ Shield | 0200-09072 |
| 10597-000 | Shield, ceramic nitride 4-6″/ TEOS 6″ | 0200-09021 |
| 10600-000 | Insulator Lamp Cavity Left | 0200-20161 |
| 10601-000 | Insulator Lamp Cavity Right | 0200-20162 |
| 10602-000 | Insulator Lamp Cavity Left | 0200-20163 |
| 10603-000 | Insulator Lamp Cavity Right | 0200-20164 |
| 10609-000 | QTZ., INSULATOR, BASE PLATE, AME 8330 | 0200-00006 |
| 10610-000 | ENDURA, CHAMBER A, INSULATOR, QUARTZ | 0200-00151 |
| 10611-000 | QTZ., CENTURA SOG ETCH SHADOW RING | 0200-00436 |
| 10612-000 | WINDOW, QUARTZ | 0200-09005 |
| 10613-000 | Quartz slit window | 0200-09664 |
| 10614-000 | QTZ., BLADE, 6″, FOR CENTURA AMAT | 0200-35003 |
| 10615-000 | QTZ., CENTURA MXP+ SILICON RING | 0200-35623 |
| 10616-000 | insulator | 0200-00221 |
| 10619-000 | WINDOW, QUARTZ LAMP HOUSING | 0200-35222 |
| 10621-000 | INSULATING PIPE QTZ 200MM EXT | 0200-00071 |
| 10622-000 | RING QTZ 8″ EXT CATH METAL NOTCHED | 0200-09217 |
| 10623-000 | RING EXTERNAL QUARTZ 8″ | 0200-09222 |
| 10624-000 | RING FOCUS QTZ 200MM POLY/WSI | 0200-09741 |
| 10625-000 | WINDOW RDCD HG RECESSED ENDPOINT MXP | 0200-10392 |
| 10633-000 | Silicon Ring | 0200-00639 |
| 10634-000 | Quartz Cover Ring ( same as 11906-000 and 0200-01271) | 0200-02619 |
| 10635-000 | Quarz Shadow Ring | 0200-00849 |
| 10636-000 | Quarz Shadow Ring (New) | 0200-01463 |
| 10637-000 | Quartz Gas Injector x 4 | 0200-01612 |
| 10638-000 | Quartz Gas Injector (Old) | 0200-00917 |
| 10639-000 | Quartz Gas Injector Blank | 0200-00811 |
| 10640-000 | Quartz Endpoint Window | 0200-01118 |
| 10641-000 | Silicon Ring | 0200- 01509 |
| 10642-000 | Quartz Shadow Ring 200mm | 0200-01119 |
| 10775-000 | See Part No. 10776-000 | 0200-00289 |
| 10776-000 | Cylinder, Wafer Support, SI Coated Radiance | 0200-00289 |
| 10777-000 | Lift Pin, TIP, 2mm, Radiance | 0200-00672 |
| 10779-000 | Lift Pin Cooldown | 0200-35013 |
| 10780-000 | DNC, Liner, Upper, QTZ, EPI | 0200-35017 |
| 10781-000 | see Part No. 10513-000 | 0200-35018 |
| 10782-000 | Qtz Insert Injector, EPI/POLY, 2 Zone | 0200-35019 |
| 10783-000 | Preheat Ring, EPI | 0200-35022 |
| 10784-000 | Lower Liner Qtz, EPI REDUCED PRESSURE | 0200-35023 |
| 10785-000 | See Part No. 10511-000 | 0200-35042 |
| 10786-000 | Upper Chamber Liner, NIT | 0200-35097 |
| 10787-000 | Lower Chamber Liner, NIT | 0200-35098 |
| 10788-000 | Window Adapter, 2mm, RP Chamber, RTP | 0200-35145 |
| 10789-000 | Lift Pin | 0200-35146 |
| 10790-000 | Lamp Spacer Tube | 0200-35149 |
| 10791-000 | Black Poly Coat Susceptor (VSP) | 0200-35157A |
| 10792-000 | DNC, Lower Chamber Liner, POLY | 0200-35161 |
| 10793-000 | Qtz Ring, Upper Liner, POLY | 0200-35162 |
| 10794-000 | Lift Pin, Wafer, POLY | 0200-35207 |
| 10795-000 | See Part No. 10619-000 | 0200-35222 |
| 10796-000 | View Port Window | 0200-35224 |
| 10797-000 | Susceptor, EPI | 0200-35359A |
| 10798-000 | Insert, SI, CH Reflector, RTP Chamber | 0200-35362 |
| 10799-000 | See Part No. 10255-000 | 0200-35424 |
| 10800-000 | Shaft, Susceptor Support EPI,NIT | 0200-35425 |
| 10801-000 | Ring, Preheat,NIT,QTZ | 0200-35435 |
| 10802-000 | Shaft, Susceptor Support, POLY | 0200-35573 |
| 10803-000 | Lift Pin, NIT, EPI | 0200-35618P1 |
| 10804-000 | See Part No. 10588-000 | 0200-35917 |
| 10805-000 | Edge Ring, Preheat | 0200-36118 |
| 10806-000 | Quartz Base Plate | 0200-00715 |
| 10807-000 | Sic insert 200mm | 0200-00714 |
| 10808-000 | silicon plug | 0200-10554 |
| 10809-000 | BLADE, MOD2 RTA, ROBOT, FROSTED QUARTZ | 0200-35004 |
| 10810-000 | BLADE, MOD1 RTA, ROBOT, FROSTED QUARTZ | 0200-36638 |
| 10816-000 | Shadow ring | 0200-01463 |
| 10830-000 | Cover Qtz 8″ Steppe DLIFT 2 Notch | 0200-09911 |
| 10842-000 | PIN, QUARTZ RTP LIFT | 0200-35486 |
| 10848-000 | Insulator Lamp Cavity Right | 0200-20162 |
| 10849-000 | Insulator Lamp Cavity Left | 0200-20163 |
| 10850-000 | Insulator Lamp Cover Right | 0200-20164 |
| 10851-000 | Tube Insulator. 1.8″ | 0200-76041 |
| 10896-000 | COLLAR QTZ 150 MM POLY EXT CATH | 0200-09558 |
| 10897-000 | RING FOCUSING 150 MM EXT CATH | 0200-09557 |
| 10912-000 | ASP+ QTZ GDP | 0200-00087 |
| 10913-000 | QUARTZ PIPE MXP | 0200-09179 |
| 10914-000 | QUARTZ RING PEDESTAL (WITH FLAT), AMAT | 0200-09243 |
| 10915-000 | COVER, QUARTZ, NARROW GAP | 0200-09977 |
| 10916-000 | COVER, QUARTZ, W/O SCREW HOLES | 0200-10411 |
| 10917-000 | QUARTZ PIN, LIFT, COOLDOWN | 0200-35779 |
| 10933-000 | Quartz Outer Ring | 0200-09610 |
| 10934-000 | Quartz slit window | 0200-09002 |
| 10939-000 | PEDESTAL QUARTZ RING | 0200-09216 |
| 10940-000 | QUARTZ INSULATOR | 0200-20058 |
| 10941-000 | QUARTZ INSULATOR (also 10134-000) | 0200-20459 |
| 10945-000 | Quartz DC Bias Plug NGDT | 0200-09605 |
| 10949-000 | window Sapphire | 0200-09970 |
| 10951-000 | Shadow ring | 0200-10151 |
| 11163-000 | Shield – modified | 0200-09072 |
| 11235-000 | BLADE, 6 AND 8” | 0200-40126 |
| 11280-000 | insert chamber inlet 5 zone | 0200-89005 |
| 11287-000 | 8 inch quartz blade | 0200-35539 |
| 11289-000 | 200mm Lower Dome, MATL TBD (OP1 / OM100) | 0200-35042 same 0200-05207 |
| 11295-000 | DOME | 0200-35007 |
| 11358-000 | Insulator | PT-0643-0003 & 0200-00152 |
| 11361-000 | Shadow Ring | 0200-10243 |
| 11410-000 | QUARTZ WINDOW .156 THICK | 0200-35265 |
| 11421-000 | RAISED UPPER DOME | 0200-35084 |
| 11468-000 | UPPER LINER | 0200-35024 |
| 11469-000 | LOWER DOME | 0200-35042 |
| 11470-000 | Lower Chamber Liner, EPI ATM, Non-Vented, OP-1 (HQA-90153663) | 0200-35065 |
| 11471-000 | WAFER LIFT SHAFT | 0200-35424 |
| 11472-000 | INJECTOR INSERT | 0200-35019 |
| 11473-000 | INJECTOR BAFFLE | 0200-35020 same as 0200-12367 |
| 11475-001 | UPPER DOME PLATE | 99780239 0200-35007 |
| 11481-000 | WINDOW, LCF, SLIT VLV ACTUATOR | 0200-00166 |
| 11482-000 | WINDOW, LCF, BUFFER/TRANSFER CH | 0200-00167 |
| 11496-000 | APC Top plate | 0200-03983 |
| 11497-000 | GDP | 0200-05512 |
| 11498-000 | Heater Focus ring | 0200-05511 |
| 11499-000 | Liner | 0200-03979 |
| 11500-000 | Bottom Liner | 0200-04366 |
| 11501-000 | APC Tube Liner | 0200-05509 |
| 11504-000 | insert chamber inlet 5 zone | 90157275 0200-89005 |
| 11519-000 | Cover Top Preclean Chamber | 0200-00218 |
| 11531-000 | Upper Dome, Curved | 0200-89023 |
| 11532-000 | UPPER DOME , 300MM | 0200-03166 |
| 11534-000 | Lower Dome, EPI/HTF 300MM | 0200-89004 |
| 11579-000 | Blade quartz 200mm | 0200-00135 90156855 |
| 11580-000 | SHAFT, GEN 1 RETROFIT | 0200-11739 |
| 11583-000 | Upper Liner, No Purge Path, Insitu Plasma Clean Enabled | 0200-11488 |
| 11584-000 | Consumable Quartz Ring (ID11.25xOD13.125x.185) | 0200-03455 |
| 11589-000 | Shield Sputter Etch 150mm | 0200-09083 |
| 11590-000 | ring quartz thick 150mm sputter etch | 0200-09087 |
| 11591-000 | Liner, Chamber, Upper, 300MM EPI RP | 0200-07880 |
| 11592-000 | Ultra 150MM Mod | 0200-20325 Rev001 |
| 11597-000 | lid liner TXZ | 0200-00689 |
| 11598-000 | isolator enchanced pumping | 0200-10163 |
| 11599-000 | chamber insert | 0200-00261 |
| 11600-000 | heater lift pin tapered | 0200-01798 |
| 11616-000 | TBD – 200mm Lower Dome, MATL TBD (OP1 / OM100) | 0200-35042 same 0200-05207 |
| 11619-000 | Shaft, Wafer Lift, 9.0 BC | 0200-89015 |
| 11620-000 | deposition ring ceramic | 0200-01365 |
| 11622-000 | susceptor shaft | 0200-00412 |
| 11631-000 | LINER, CHAMBER LOWER/MIN, 8 HOLE | 0200-89054 |
| 11632-000 | LINER, CHAMBER, UPPER, .25 POCKET | 0200-89002 |
| 11633-000 | SHAFT, SUSCEPTOR SUPPORT, WITH PINS | 0200-89033 |
| 11635-000 | Bell Jar Dome | 0200-00822 |
| 11638-000 | chamber liner lower epi, atm | 0200-35688 |
| 11640-000 | OP SHAFT, SUSCEPTOR SUPPORT, WITH PINS | 0200-35208 |
| 11642-000 | WINDOW, VIEW POLY DPS | 0200-35334 |
| 11648-000 | LIFT PIN, 149 DIA TRIANGULAR | 0200-36373 |
| 11649-000 | RING FINGER LIFT PRODUCER SE | 0200-01991 |
| 11688-000 | Purge Ring | 0200-00624 |
| 11689-000 | Ring, Outer 200mm WXZ NCSR | 0200-00622 |
| 11708-000 | Deposition Ring, Ceramic, 300mm (w/ or w/o BB) | 0200-02916 (PT-06243-4075 w/o BB) |
| 11711-000 | Quartz Tube applicator Use Alt LTD # 10464 | 0200-05376 same 0200-35599 |
| 11722-000 | cover ring ceramic ( similer to pt-0243-0053) | 0200-00673 pt-0243-0023 |
| 11724-000 | Liner Chamber upper 300mm EPI | 0200-02468 similar to 0200-07880 |
| 11745-000 | Silicon Carbide Wafer Lift Pin | 0200-00196 |
| 11748-000 | Antenna Dowel Pin | 00200-24018 pt-0843-0001 |
| 11749-000 | collar 300mm SNNF | 0200-18109 |
| 11750-000 | cover low profile | 0200-18081 |
| 11758-000 | Quartz Shadow Ring 200mm, MODIFIED (Ø.124 BOSS, Ø9.915″ B.C. REDUCED BY 14MM & H +2MM) | 0200-01119 MODIFIED |
| 11764-000 | shadow ring with notch align | 0200-39346 |
| 11766-000 | Isolator ceramic | 0200-03026 |
| 11767-000 | outer | 0200-04454 |
| 11768-000 | single ring | 0200-05959 |
| 11775-000 | top ring | 0200-04853 |
| 11776-000 | lift pin | 0200-01196 |
| 11777-000 | window 1.250 ida. X .125 +/-.003 thick Sapphire $150 ea | 0200-01195 |
| 11785-000 | 0200-04876 | |
| 11786-000 | insert ring ceramic | 0200-10143 |
| 11788-000 | Cover quartz 6” | 0200-00059 |
| 11789-000 | small window | 0200-09024 |
| 11790-000 | ring cover | 0200-09474 |
| 11791-000 | focus ring | 0200-09555 |
| 11792-000 | SI, 16 hole serialized | 0200-07372 Rev01 |
| 11793-000 | Sapphire Lift Pin | 0200-04655 |
| 11794-000 | Chamber insert ceramic similer to 0200-00261 | 0200-36105 |
| 11795-000 | LID Liner similer to 0200-00689 | 0200-00690 |
| 11798-000 | Robot Blade quartz 200mm, EHP-CR | 0200-35692 |
| 11801-000 | INSULATOR, 300MM SOURCE ADAPTER | 0200-07442 Rev 05 |
| 11801-001 | INSULATOR, 300MM SOURCE ADAPTER, MODIFIED | 0200-07442 Rev 05 |
| 11801-002 | TEFLON RING | 0200-07442 Rev 05 |
| 11801-003 | ASSEMBLY,INSULATOR, 300MM, MODIFIED | 0200-07442 Rev 05 |
| 11804-000 | Ring, Tight Gap, Silicon, 200mm Notch | 0200-10446 |
| 11807-000 | insulator 300mm | 0200-76058 |
| 11818-000 | STEAM GENERATOR TUBE | 0200-09598 |
| 11819-000 | Dome ceramic | 0200-01006 |
| 11830-000 | cover ring | 0200-09243 |
| 11831-000 | Baffle inject | 0200-01559 |
| 11832-000 | Liner,Chanber Lower X-Flow | 0200-08114 |
| 11833-000 | Block, Chamber Liner Insert, X-Flow | 0200-07892 |
| 11834-000 | Insert, Slit Valve Tunnel W/Pinning | 0200-08002 |
| 11835-000 | Locking | 0200-10702 |
| 11836-000 | Tip, Shaft, Susceptor Support E2 Chamber | 0200-89032 |
| 11837-000 | Pin, Wafer Lift, Thin Wall SIC. | 0200-03201 |
| 11838-000 | Ring, Slotted Preheat, .15 Thk | 0200-03259 |
| 11839-000 | Susceptor, Pin Lift, Dished Pocket Tapered Ledge | 0200-01947 |
| 11840-000 | Insert, Chamber Exhaust Liner Quartz | 0200-07232 |
| 11841-000 | Pin Locking Chamber Lower Liner 300MM | 0200-05117 |
| 11842-000 | Six Arm Susceptor Support Shaft | 0200-05388 |
| 11851-000 | Window quartz 5mm thick 300mm | 0200-07958 |
| 11855-000 | shield quartz 200mm sputter | 0200-09608 |
| 11862-000 | window | 0200-00057 |
| 11863-000 | COVER WRAPAROUND QTZ OX/MLR/NIT | 0200-09346 |
| 11873-000 | OBS FILTER, INFRA-RED, VIEWPORT | 0200-35348 |
| 11883-000 | Conical Pin | 0200-35780 |
| 11890-000 | 150mm shadow ring | 0200-39347 |
| 11891-000 | Plate quartz gas dist upper ASP | 0200-09447 |
| 11892-000 | plate gas lower 150mm | 0200-09448 |
| 11893-000 | ring single ceramic | 0200-36687 |
| 11894-000 | ring single ceramic 150mm low profile | 0200-36691 |
| 11895-000 | ring single low profile 200mm | 0200-36685 |
| 11897-000 | RING, SINGLE, CERAMIC, 145MM SEMI MAJOR FLAT, DPS | 0200-35432 |
| 11900-000 | quartz ring | 0200-07524 |
| 11901-000 | silicon ring collar 300mm | 0200-03736 |
| 11906-000 | Cover Plate, same as ( 10634-000 and 0200-02619) | 0200-01271 |
| 11908-000 | Liner side GDP | 0200-02981 |
| 11909-000 | Top Cap GDP | 0200-02980 |
| 11910-000 | Lower GDP | 0200-02273 |
| 11911-000 | Window | 0200-01351-R |
| 11912-000 | Isolator ceramic | 0200-36609 |
| 11913-000 | spttter ring | 0200-09087 |
| 11916-000 | Cover Skirt | 0200-01993 |
| 11918-000 | insert ring chamber ceramic | 0200-39324 |
| 11928-000 | Qtz Ring, Upper Liner, Poly | 0200-35162 |
| 11930-000 | Gas Insert | 0200-07577 |
| 11935-000 | Shield Pumping Insert | 0200-10164 |
| 11936-000 | Quartz Shadow Ring | 0200-01119 |
| 11937-000 | Shield L support | 0200-09974 |
| 11938-000 | Screw lid | 0200-35611 |
| 11939-000 | Quartz Shadow Ring | 0200-10445 |
| 11940-000 | Silicon Ring | 0200-01509 |
| 11941-000 | quartz cover outer 8″ step | 0200-10041 |
| 11942-000 | QUARTZ COVER,INNER,8″,NOTCH,STEP3,ESC | 0200-10042 |
| 11943-000 | Pin Wafer | 0200-09035 |
| 11948-000 | insert ring silicon 150mm flat | 0200-00417 |
| 11950-000 | Liner ceramic top | 0200-02414 |
| 11951-000 | liner ceramic middle | 0200-02525 0200-14255 |
| 11952-000 | liner ceramic bottom 300mm | 0200-00668 0200-15205 |
| 11953-000 | lift hoop pin lift fixed floating | 0200-03312 0200-08334 |
| 11954-000 | Focus Ring, Roughened (NEW # IS 10395-020) | 0200-09787 |
| 11957-000 | Gas Distribution Plate, Ceramic | 0200-10246 |
| 11962-000 | · DOME CERAMIC DPS CHAMBER | 0200-10297 |
| 11963-000 | Gas Distribution Plate | 0200-10246 |
| 11966-000 | Ring Single 195mm Semi Notch Quartz DPS | 0200-05996 |
| 11967-000 | Pin Wafer | 0200-03486 |
| 11969-000 | GDP same as 10140-000 but fire polish holes | 0200-02776 |
| 11970-000 | cover ring | 0200-00925 |
| 11973-000 | INSULATOR 6” | 0200-01173 |
| 11979-000 | Ring | 0200-02835 |
| 11981-000 | Blade 150mm robot | 0200-35910 |
| 11990-000 | Deposition Ring, Ceramic | 0200-05808 |
| 11997-000 | Collar 150mm Flat | 0200-09626 |
| 12002-000 | insert chamber inlet 5 zone insert | 0200-89022 |
| 12004-000 | Ring Focus Ceramic | 0200-39142 |
| 12012-000 | Susceptor Graphite Pins | 0200-00207 |
| 12013-000 | TPM- Silicon Insert Ring 200MM | 0200-01239 |
| 12014-000 | 0200-04647 | |
| 12015-000 | 0200-00332 | |
| 12016-000 | Qaurtz Shield 8″ | 0200-09082EM |
| 12017-000 | Quartz Ring 8″ | 0200-09086 |
| 12018-000 | 0200-11072 | |
| 12019-000 | Preheat Ring .125 THK | 0200-35081EM |
| 12020-000 | Hollow Pin 200MM | 0200-36642 |
| 12021-000 | XL SI Susceptor (Modified) | 0200-36726 |
| 12022-000 | Susceptor 200MM NCP | 0200-36727 |
| 12023-000 | TPM- Cover, QTZ, 8″, Notch (2), HI-TEMP | 0200-39297 |
| 10142-000 | R, Confinement, mod, qtz | 716-443090-002 |
| 10143-000 | ESC Focus ring 150mm | 716-249040-001 |
| 10144-000 | window, fused silica | 716-540198-001 |
| 10145-000 | confinement ring bottom | 716-443084-003 |
| 10146-000 | confinement ring top | 716-443083-004 |
| 10147-000 | confinement ring | 716-140236-062 |
| 10192-000 | Dual Heated Endpoint Window | 716-330355-002 |
| 10214-000 | Plasma Distrn | 716-000941-001 |
| 10243-000 | NOZZEL 8 RDL-1 | 716-012639-024 REV D |
| 10303-000 | End Point Window – 9600 | 716-330355-001 ENPWQT071 |
| 10305-000 | Focus Ring – 9600 | ICS-716-330190-081-M |
| 10306-000 | Filler Ring _ 9600 | 716-031453-001 Rev E |
| 10427-000 | Lift Pin | 0200-09716 |
| 10447-000 | Window | 716-011427-001 |
| 10448-000 | LAM Funnel | 716-021323-001 |
| 10449-000 | LAM Spacer | 716-011493-001 |
| 10450-000 | lam | 716-011533-001 |
| 10465-000 | Quartz Sleeve | 716-160255-002 |
| 10479-000 | double lip flange with opaque disc in middle | 716-347266-002 |
| 10528-000 | Quartz Top Plate | 716-331157-022 |
| 10536-000 | RING, EDGE CERAMIC | 716-011651-008 |
| 10537-000 | FOCUS RING, CERAMIC | 716-011830-008 |
| 10538-000 | CERAMIC DISK | 716-028447-002 |
| 10539-000 | PLUNGER 1/4 TURN(OPS) | 716-020931-030 REV B |
| 10540-000 | WASHER, CLAMP 9600 | 716-011571-001 |
| 10541-000 | CLAMP RETAINER 9600, 1/4 TURN CERAMIC | 716-011572-001 |
| 10542-000 | GAS RING PROTECTION SLEEVE | 716-028739-001 REV 2 |
| 10543-M12 | WAFER CLAMP | 716-330973-281(MODIFIED) |
| 10544-000 | RING,CLAMP ATTACHMENT | 716-011963-003 |
| 10558-000 | Lower Chamber Ring | 716-031453-001 REV E |
| 10561-000 | Window heater | 716-031052-001 |
| 10568-000 | Heated end point window | 716-031052-002 |
| 10572-000 | disc quartz | 716-028454-012 |
| 10620-000 | Quartz Window | 716-011009-001 |
| 10629-000 | QUARTZ RETAINING RING | 716-140432-061 |
| 10828-000 | Furnace (Wrong Description) – same as 10448-000 | 716-021323-002 |
| 10904-000 | HPT COVER RING .125 | 716-008645-001 |
| 10932-000 | EPD Window (also 10303-000) | 716-330355-001 |
| 10942-000 | HOT EDGE RING | 716-140163-261 |
| 10943-000 | CONFINEMENT RING | 716-140236-003 |
| 10944-000 | FOCUS RING | 716-140118-001 |
| 11175-000 | Quartz Top Plate | 716-331097-001 |
| 11182-000 | 8” Focus Ring | 716-443129-001 |
| 11183-000 | cover ring | 716-008645-003 |
| 11211-000 | RING , WAP | 716-017112-330 |
| 11250-000 | Bell Jar Sleeve | 716-160255-002 |
| 11290-000 | WDO,GAS INJ,FACE SEAL,QRTZ,NSG | 716-012640-012 |
| 11291-000 | WDO,GAS INJ,FACE SEAL,QRTZ,NSG | 716-0122640-011 |
| 11293-000 | RING,EDGE,BOT,200-300MM | 716-026652-002 |
| 11387-000 | locking ring (DUPICATE | 716-017112-330 |
| 11524-000 | ceramic injector | 716-003473-802 |
| 11525-000 | ceramic ring cap | 716-800951-001 |
| 11526-000 | 300mm Ceramic Insulator Disc | 716-003481-803 |
| 11574-000 | Quartz Gas Ring | 716-140432-001 |
| 11601-000 | 512 Quartz Disc | 716-028485-512 |
| 11602-000 | Top Wide Edge Ring | 716-331142-001 |
| 11603-000 | Base Edge Ring | 716-443179-102 |
| 11604-000 | High Purity Quartz Disc | 716-331157-004 |
| 11605-000 | Cylindrical Quartz Sleeve (qtz insulator ring) | 716-330915-003 |
| 11606-000 | Upper Quartz Ring | 716-140432-002 |
| 11607-000 | Confinement Ring | 716-140236-003 |
| 11608-000 | Quartz Cover Ring | 716-443189-002 |
| 11609-000 | Upper Quartz Ring (Exelan) | 716-443090-010 |
| 11610-000 | Confinement Ring (Exelan) | 716-443230-002 |
| 11611-000 | Quartz Coupling Ring | 716-140169-002 |
| 11612-000 | Window Tep, Qz 9600 | 716-330891-002 |
| 11720-000 | Gas Injector Nozzle, 8-Hole Quartz | 716-008718-001-D |
| 11723-000 | Ring Edge top 230 | 716-031257-309 |
| 11727-000 | ceramic ring | 716-024479-003 |
| 11729-000 | QUARTZ RING | 716-803156-004 |
| 11731-000 | ADPTR FOC Quartz | 716-012795-002 |
| 11732-000 | Baffle CHBR 2300 | 716-801451-019 |
| 11733-000 | insulator ring esc tapped 300mm | 716-800330-002 |
| 11734-000 | WDO Quartz Gas inject fire polish | 716-801306-004 |
| 11735-000 | ring filler step dfc 200mm | 716-016763-001 |
| 11736-000 | ring foc stepped dfc 200mm | 716-015595-002 |
| 11737-000 | Ring Wap Quartz Generic 200mm | 716-016831-002 |
| 11738-000 | Ring WAP Twist Top stepped DFC200mm | 716-016830-002 |
| 11746-000 | ring cnfmt cont ramp one pices | 716-016394-002 |
| 11771-000 | TCP window disk top gas | 716-331157-014 |
| 11772-000 | Ring WAP locking ring | 716-017112-623 |
| 11773-000 | Ring Edge top 300mm | 716-031257-531 |
| 11774-000 | ring edge bottom 300mm | 716-026652-902 |
| 11809-000 | quartz esc insulator | 716-331099-001 |
| 11811-000 | edge Ring | 716-026652-911 |
| 11812-000 | edring | 716-077262-004 |
| 11813-000 | Ring edge 6” ceramic | 716-030136-001 |
| 11845-000 | quartz disk | 716-028454-512 |
| 11846-000 | ring hot edge esc 8” | 716-140139-211 |
| 11847-000 | R, edge | 716-330045-281 |
| 11848-000 | plate shower head | 716-330892-007 |
| 11849-000 | r,h edge | 716-443086-401 |
| 11850-000 | ring focus | 716-443234-002 |
| 11854-000 | R, Edge 6 in 1.5mm top Qtz ESC | 716-331099-066 |
| 11866-000 | Cylindrical Ceramic Sleeve | 716-330915-001 |
| 11885-000 | cov, ring quartz | 716-013402-003 |
| 11898-000 | edge 8 es top quartz | 716-331088-001 |
| 11903-000 | ring | 716-031257-309-mod |
| 11925-000 | Bottom Edge Ring | 500669, 716-026652-911 |
| 11926-000 | Quartz Guard Ring | 716-067739-117 |
| 11958-000 | Ring edge | 716-030135-001 |
| 12024-000 | 716-003377-003 | |
| 12025-000 | 716-007136-011 | |
| 12026-000 | 716-008645-005 | |
| 12027-000 | 716-012639-540 | |
| 12028-000 | LAM OEM# 73-30101 | 716-012640-011 |
| 12029-000 | Ring H Edge | 716-015590-001 |
| 12030-000 | Ring, H Edge, SI, H N | 716-015590-001 |
| 12031-000 | 716-016394-013 | |
| 12032-000 | Ring, WAP, QTZ, Generic, 200MM KK51182 | 716-016831-007 |
| 12033-000 | 716-028454-715 | |
| 12034-000 | Ring, Edge, Top, 23 | 716-031257-209 |
| 12035-000 | Ring Edge, Top, QTZ, EBP, 20 | 716-031257-521 |
| 12036-000 | Hot Edge Ring Ceramic, 8″ | 716-140139-001 |
| 12037-000 | Hot Edge Ring 8″ | 716-140139-213 |
| 12038-000 | Hot Edge Ring | 716-140163-001 |
| 12039-000 | Quartz Ring, Upper | 716-140432-004 |
| 12040-000 | Window RF Shaped Rough | 716-330121-001 |
| 12041-000 | Ring, Focus, 8″ ESC Rough | 716-330504-081 |
| 12042-000 | 716-331142-201 | |
| 12043-000 | Disc, Interferometer 8″ GE 124 | 716-331157-015 |
Es werden weitere unterrichtskonzepte Ressource besprochen.