Products

LTD PART No. DESCRIPTION OEM No.
10052-00 BELL JAR 0200-00525/0040-21178
10053-000 PIN, COVER RF SCREW VECTRA IMP 0200-20216 REV
10065-000 INSULATOR Modifier 0200-00221 / PT-0643-0023
10066-000 INSULATOR 0200-20426 REV 001 / PT-0643-0002
10110-000 WINDOW 4MM APERTURE RECESSED ENDPOINT 0200-35801 REV 001
10118-000 WINDOW 6MM APERTURE RECESSED ENDPOINT 0200-10133 REV 001
10120-000 SHADOW RING 0200-10176   REV 003
10122-000 DEPOSITION RING 0200-00674 REV 3
10123-000 DEPOSITION RING 0200-01155 REV 1
10127-000 0200-35783
10128-000 Shadow Ring, Quartz, 200mm Notch 0200-36696
10130-000 STEP COVER RING 0200-09789
10131-000  WINDOW RECESSED ENDPOINT 0200-09657
10134-000 INSULATOR 0200-20459
10135-000 cover plate 0200-36631
10136-000 ceramic pin 0200-10284
10137-000 ceramic deposition ring (COVER RING 8″) 0200-20331 / PT-0243-0029
10138-000 Insulator Quartz 200mm 0200-10073
10140-000 GDP Quartz 0200-00410
10141-000 Quartz Tube 0200-00148
10149-000 SHADOW RING 0200-76068
10150-000 Ring 0200-40194
10151-000 Collar 0200-40211
10152-000 Baffle 0200-40209
10153-000 Dome 0200-40218
10154-000 Liner 0200-40158
10155-000 Cover 0200-40131
10156-000 Insert 0200-40091
10157-000 Shaft 0200-40222
10158-000 Shaft 0200-40221
10159-000 Pin 0200-40156
10164-000 Plate 0200-10555
10165-000 Ring 0200-00295
10166-000 Insert 0200-10549
10167-000 Baffle 0200-40208
10168-000 Shadow ring 0200-10445
10170-000 Window Heater 0200-09074 or 10051805
10173-000 Pin Lift Heater 0200-10284
10184-000 Cover plate 0200-36630
10189-000 ceramic ring 0200-10169 rev b
10191-000 Cap Rigid Coil Support 0200-20170
10193-000 pin wafer lift 0200-35207
10194-000 Chamber liner 0200-35161-B
10197-000 Labyrinth 0200-20175
10199-000 upper pedestal cover dep. Ring 8″ 0200-20285
10201-000 Rest Button 0200-20315 pt-0243-0031
10226-000 Sapphire Window 0200-09969
10232-000 Shadow ring 0200-01284
10233-000 Shadow ring 0200-00828
10234-000 Insulator 300mm emax 0200-00831
10235-000 Cap top 300mm 0200-00761
10236-000 Gas Distribution Plate 0200-01003
10237-000 liner side 0200-00762
10238-000 Single Ring 0200-00981
10239-000 Insulator 300mm 0200-36034
10240-000 Focus Ring 8″ 209mm ID Notch Life MX 0200-09787
10241-000 Cover Ring 0200-09911 Modified
10242-000 Gas Distribution Plate 0200-10246
10244-000 Insulator 0200-00221
10245-000 Bushing 0200-00340 PT-0243-0024
10248-000 Silicon Insert Ring 0200-00829-002-621-034-1
10250-000 Labyrinth 0200-20217
10251-000 Insulator ceramic 0200-20169
10252-000 Housing Ceramic 0200-20215
10255-000 Shaft, Wafer Lift 200mm 0200-35424 Rev D
10256-000 Shaft, Susceptor \Support 0200-35573 Rev D
10267-000 cover plate modified 0200-00218 Modified
10269-000 Insulator 300mm 0200-01903(10286786)
10298-000 Ring Single 0200-36689
10299-000 Cover Quartz ESC NGDT (2 Flats) 0200-09977 similar to 10446-000
10300-000 pipe insulating QTZ ESC 0200-09603
10350-000 Base plate 0200-40131 or 0200-50124
10351-000 viewport window 0200-00934
10377-000 Gas Tube 0200-09025
10378-000 Plate, Edge Cover, DxZ 0200-10169
10383-000 Gas Feed Tube OD 6.35 BWCVD 0200-09450
10385-000 Door Preclean chmber 0200-20001
10386-000 Lower Shield 0200-20003
10390-000 CVD Chamber Slit Window 0200-09964
10391-000 Ceramic, C Shape Ring 0200-36415
10392-000 Ceramic, Bottom Pumping Plate 0200-36416
10393-000 Ceramic, Top Pumping Plate 0200-36417
10394-000 Ceramic, Pumping Channel Cover 0200-36418
10395-000 focus ring 0200-09787
10395-010 Focus Ring (Shortened by .500”) 0200-09787
10395-020 Focus Ring, Roughened 0200-09787
10396-000 Insert Ring, Silicon, 200mm Notch 0200-10446
10397-000 Dome 0200-39137
10398-000 Focus Ring 0200-39140
10399-000 Capture Ring 0200-35323
10400-000 Gas Feed Housing 0200-35290
10401-000 Gas Feed Inserts 0200-35291
10402-000 Endpoint Window 0200-35292
10403-000 Manometer Window 0200-35293
10419-000 INSULATOR 6” 0200-01172 Rev 002
10420-000 COVER 0200-01176 Rev 002
10421-000 Window 0200-09158
10427-000 Lift Pin 0200-09716
10437-000 Capture Ring 0200-10377
10438-000 Window, Lower Chamber 0200-35294
10439-000 Gas Feed Housing 0200-35295
10440-000 Gas Feed Inserts 0200-35296
10441-000 Dome IEP 0200-35956
10442-000 Window, Sapphire IEP 0200-35957
10443-000 Aperature, Ceramic, AEP 0200-39296
10445-000 Cap 8 ESC Quartz 0200-09785
10446-000 Cover Ring QTZ 200mm High Profile Notch 0200-09606 similar to 10299-000
10452-000 Gas Dist. Plate 8.5″ O.D. 0200-09201
10453-000 QTZ. Liner ASP lower gas dist. 0200-36682
10454-000 QTZ. Liner ASP upper gas dist. 0200-36680
10455-000 QTZ top cap 25mm tube ASP 0200-09444
10456-000 Pipe insulating lift ESC 0200-09782
10463-000 GDP Middle 5 Hole 0200-09478
10464-000 Tube Applicator 0200-00149
10470-000 6″ ceramic wafer 0200-10007
10473-000 Rough Dome 0200-10324
10474-000 Rough Focus Ring 0200-00137
10475-000 Manometer Port Window 0200-39135
10476-000 Inner Tube 0200-39133
10477-000 Window, Sapphire, Endpoint 0200-39134
10478-000 Window, Sapphire, Viewport 0200-36461
10489-000 rear quartz shield 0200-03387
10490-000 Ring 0200-00602
10491-000 Sleeve application Sappire 0200-10387
10494-000 Ring Single 0200-36692
10495-000 quartz ring 0200-00602
10511-000 Dome Lower 0200-35042
10512-000 Insert QTZ. Inject 2 zone 0200-35916
10513-000 insert QTZ Exhaust 0200-35018
10514-000 Baffle inject 3 zone 0200-35159
10546-000 SHIELD,150MM CERAMIC,WXZ 0200-09121
10554-000 SHIELD LOWER, PCI QUARTZ 0200-20005
10555-000 INSULATOR, PCI QUARTZ 0200-20002
10559-000 Shadow ring 0200-00621
10560-000 window 0200-09074 special material
10569-000 insulator 0200-00221 mod
10587-000 dome upper 0200-35084
10588-000 inject insert 0200-35917
10594-000 8″ Shield 0200-09072
10597-000 Shield, ceramic nitride 4-6″/ TEOS 6″ 0200-09021
10600-000 Insulator Lamp Cavity Left 0200-20161
10601-000 Insulator Lamp Cavity Right 0200-20162
10602-000 Insulator Lamp Cavity Left 0200-20163
10603-000 Insulator Lamp Cavity Right 0200-20164
10609-000 QTZ., INSULATOR, BASE PLATE, AME 8330 0200-00006
10610-000 ENDURA, CHAMBER A, INSULATOR, QUARTZ 0200-00151
10611-000 QTZ., CENTURA SOG ETCH SHADOW RING 0200-00436
10612-000 WINDOW, QUARTZ 0200-09005
10613-000 Quartz slit window 0200-09664
10614-000 QTZ., BLADE, 6″, FOR CENTURA AMAT 0200-35003
10615-000 QTZ., CENTURA MXP+ SILICON RING 0200-35623
10616-000 insulator 0200-00221
10619-000 WINDOW, QUARTZ LAMP HOUSING 0200-35222
10621-000 INSULATING PIPE QTZ 200MM EXT 0200-00071
10622-000 RING QTZ 8″ EXT CATH METAL NOTCHED 0200-09217
10623-000 RING EXTERNAL QUARTZ 8″ 0200-09222
10624-000 RING FOCUS QTZ 200MM POLY/WSI 0200-09741
10625-000 WINDOW RDCD HG RECESSED ENDPOINT MXP 0200-10392
10633-000 Silicon Ring 0200-00639
10634-000 Quartz Cover Ring      ( same as 11906-000 and 0200-01271) 0200-02619
10635-000 Quarz Shadow Ring 0200-00849
10636-000 Quarz Shadow Ring  (New) 0200-01463
10637-000 Quartz Gas Injector  x 4 0200-01612
10638-000 Quartz Gas Injector  (Old) 0200-00917
10639-000 Quartz Gas Injector Blank 0200-00811
10640-000 Quartz Endpoint Window 0200-01118
10641-000 Silicon Ring 0200- 01509
10642-000 Quartz Shadow Ring 200mm 0200-01119
10775-000 See Part No. 10776-000 0200-00289
10776-000 Cylinder, Wafer Support, SI Coated Radiance 0200-00289
10777-000 Lift Pin, TIP, 2mm, Radiance 0200-00672
10779-000 Lift Pin Cooldown 0200-35013
10780-000 DNC, Liner, Upper, QTZ, EPI 0200-35017
10781-000 see Part No. 10513-000 0200-35018
10782-000 Qtz Insert Injector, EPI/POLY, 2 Zone 0200-35019
10783-000 Preheat Ring, EPI 0200-35022
10784-000 Lower Liner Qtz, EPI REDUCED PRESSURE 0200-35023
10785-000 See Part No. 10511-000 0200-35042
10786-000 Upper Chamber Liner, NIT 0200-35097
10787-000 Lower Chamber Liner, NIT 0200-35098
10788-000 Window Adapter, 2mm, RP Chamber, RTP 0200-35145
10789-000 Lift Pin 0200-35146
10790-000 Lamp Spacer Tube 0200-35149
10791-000 Black Poly Coat Susceptor (VSP) 0200-35157A
10792-000 DNC, Lower Chamber Liner, POLY 0200-35161
10793-000 Qtz Ring, Upper Liner, POLY 0200-35162
10794-000 Lift Pin, Wafer, POLY 0200-35207
10795-000 See Part No. 10619-000 0200-35222
10796-000 View Port Window 0200-35224
10797-000 Susceptor, EPI 0200-35359A
10798-000 Insert, SI, CH Reflector, RTP Chamber 0200-35362
10799-000 See Part No. 10255-000 0200-35424
10800-000 Shaft, Susceptor Support EPI,NIT 0200-35425
10801-000 Ring, Preheat,NIT,QTZ 0200-35435
10802-000 Shaft, Susceptor Support, POLY 0200-35573
10803-000 Lift Pin, NIT, EPI 0200-35618P1
10804-000 See Part No. 10588-000 0200-35917
10805-000 Edge Ring, Preheat 0200-36118
10806-000 Quartz Base Plate 0200-00715
10807-000 Sic insert 200mm 0200-00714
10808-000 silicon plug 0200-10554
10809-000 BLADE, MOD2 RTA, ROBOT, FROSTED QUARTZ 0200-35004
10810-000 BLADE, MOD1 RTA, ROBOT, FROSTED QUARTZ 0200-36638
10816-000 Shadow ring 0200-01463
10830-000 Cover Qtz 8″ Steppe DLIFT 2 Notch 0200-09911
10842-000 PIN, QUARTZ RTP LIFT 0200-35486
10848-000 Insulator Lamp Cavity Right 0200-20162
10849-000 Insulator Lamp Cavity Left 0200-20163
10850-000 Insulator Lamp Cover Right 0200-20164
10851-000 Tube Insulator. 1.8″ 0200-76041
10896-000 COLLAR QTZ 150 MM POLY EXT CATH 0200-09558
10897-000 RING FOCUSING 150 MM EXT CATH 0200-09557
10912-000 ASP+ QTZ GDP 0200-00087
10913-000 QUARTZ PIPE MXP 0200-09179
10914-000 QUARTZ RING PEDESTAL (WITH FLAT), AMAT 0200-09243
10915-000 COVER, QUARTZ, NARROW GAP 0200-09977
10916-000 COVER, QUARTZ, W/O SCREW HOLES 0200-10411
10917-000 QUARTZ PIN, LIFT, COOLDOWN 0200-35779
10933-000 Quartz Outer Ring 0200-09610
10934-000 Quartz slit window 0200-09002
10939-000 PEDESTAL QUARTZ RING 0200-09216
10940-000 QUARTZ INSULATOR 0200-20058
10941-000 QUARTZ INSULATOR (also 10134-000) 0200-20459
10945-000 Quartz DC Bias Plug NGDT 0200-09605
10949-000 window Sapphire 0200-09970
10951-000 Shadow ring 0200-10151
11163-000 Shield – modified 0200-09072
11235-000 BLADE, 6 AND 8” 0200-40126
11280-000 insert chamber inlet 5 zone 0200-89005
11287-000 8 inch quartz blade 0200-35539
11289-000 200mm Lower Dome, MATL TBD (OP1 / OM100) 0200-35042 same 0200-05207
11295-000 DOME 0200-35007
11358-000 Insulator PT-0643-0003 & 0200-00152
11361-000 Shadow Ring 0200-10243
11410-000 QUARTZ WINDOW .156 THICK 0200-35265
11421-000 RAISED UPPER DOME 0200-35084
11468-000 UPPER LINER 0200-35024
11469-000 LOWER DOME 0200-35042
11470-000 Lower Chamber Liner, EPI ATM, Non-Vented, OP-1 (HQA-90153663) 0200-35065
11471-000 WAFER LIFT SHAFT 0200-35424
11472-000 INJECTOR INSERT 0200-35019
11473-000 INJECTOR BAFFLE 0200-35020 same as 0200-12367
11475-001 UPPER DOME PLATE 99780239 0200-35007
11481-000 WINDOW, LCF, SLIT VLV ACTUATOR 0200-00166
11482-000 WINDOW, LCF, BUFFER/TRANSFER CH 0200-00167
11496-000 APC Top plate 0200-03983
11497-000 GDP 0200-05512
11498-000 Heater Focus ring 0200-05511
11499-000 Liner 0200-03979
11500-000 Bottom Liner 0200-04366
11501-000 APC Tube Liner 0200-05509
11504-000 insert chamber inlet 5 zone 90157275 0200-89005
11519-000 Cover Top Preclean Chamber 0200-00218
11531-000 Upper Dome, Curved 0200-89023
11532-000 UPPER DOME , 300MM 0200-03166
11534-000 Lower Dome, EPI/HTF 300MM 0200-89004
11579-000 Blade quartz 200mm 0200-00135 90156855
11580-000 SHAFT, GEN 1 RETROFIT 0200-11739
11583-000 Upper Liner, No Purge Path, Insitu Plasma Clean Enabled 0200-11488
11584-000 Consumable Quartz Ring (ID11.25xOD13.125x.185) 0200-03455
11589-000 Shield Sputter Etch 150mm 0200-09083
11590-000 ring quartz thick 150mm sputter etch 0200-09087
11591-000 Liner, Chamber, Upper, 300MM EPI RP 0200-07880
11592-000 Ultra 150MM Mod 0200-20325 Rev001
11597-000 lid liner TXZ 0200-00689
11598-000 isolator enchanced pumping 0200-10163
11599-000 chamber insert 0200-00261
11600-000 heater lift pin tapered 0200-01798
11616-000 TBD – 200mm Lower Dome, MATL TBD (OP1 / OM100) 0200-35042 same 0200-05207
11619-000 Shaft, Wafer Lift, 9.0 BC 0200-89015
11620-000 deposition ring ceramic 0200-01365
11622-000 susceptor shaft 0200-00412
11631-000 LINER, CHAMBER LOWER/MIN, 8 HOLE 0200-89054
11632-000 LINER, CHAMBER, UPPER, .25 POCKET 0200-89002
11633-000 SHAFT, SUSCEPTOR SUPPORT, WITH PINS 0200-89033
11635-000 Bell Jar Dome 0200-00822
11638-000 chamber liner lower epi, atm 0200-35688
11640-000 OP SHAFT, SUSCEPTOR SUPPORT, WITH PINS 0200-35208
11642-000 WINDOW, VIEW POLY DPS 0200-35334
11648-000 LIFT PIN, 149 DIA TRIANGULAR 0200-36373
11649-000 RING FINGER LIFT PRODUCER SE 0200-01991
11688-000 Purge Ring 0200-00624
11689-000 Ring, Outer 200mm WXZ NCSR 0200-00622
11708-000 Deposition Ring, Ceramic, 300mm (w/ or w/o BB) 0200-02916 (PT-06243-4075 w/o BB)
11711-000 Quartz Tube applicator Use Alt LTD # 10464 0200-05376 same 0200-35599
11722-000 cover ring ceramic ( similer to pt-0243-0053) 0200-00673 pt-0243-0023
11724-000 Liner Chamber upper 300mm EPI 0200-02468 similar to 0200-07880
11745-000 Silicon Carbide Wafer Lift Pin 0200-00196
11748-000 Antenna Dowel Pin 00200-24018 pt-0843-0001
11749-000 collar 300mm SNNF 0200-18109
11750-000 cover low profile 0200-18081
11758-000 Quartz Shadow Ring 200mm, MODIFIED (Ø.124 BOSS, Ø9.915″ B.C. REDUCED BY 14MM & H +2MM) 0200-01119 MODIFIED
11764-000 shadow ring with notch align 0200-39346
11766-000 Isolator ceramic 0200-03026
11767-000 outer 0200-04454
11768-000 single ring 0200-05959
11775-000 top ring 0200-04853
11776-000 lift pin 0200-01196
11777-000 window 1.250 ida. X .125 +/-.003 thick   Sapphire $150 ea 0200-01195
11785-000 0200-04876
11786-000 insert ring ceramic 0200-10143
11788-000 Cover quartz 6” 0200-00059
11789-000 small window 0200-09024
11790-000 ring cover 0200-09474
11791-000 focus ring 0200-09555
11792-000 SI, 16 hole serialized 0200-07372 Rev01
11793-000 Sapphire Lift Pin 0200-04655
11794-000 Chamber insert ceramic similer to 0200-00261 0200-36105
11795-000 LID Liner similer to 0200-00689 0200-00690
11798-000 Robot Blade quartz 200mm, EHP-CR 0200-35692
11801-000 INSULATOR, 300MM SOURCE ADAPTER 0200-07442 Rev 05
11801-001 INSULATOR, 300MM SOURCE ADAPTER, MODIFIED 0200-07442 Rev 05
11801-002 TEFLON RING 0200-07442 Rev 05
11801-003 ASSEMBLY,INSULATOR, 300MM, MODIFIED 0200-07442 Rev 05
11804-000 Ring, Tight Gap, Silicon, 200mm Notch 0200-10446
11807-000 insulator 300mm 0200-76058
11818-000 STEAM GENERATOR TUBE 0200-09598
11819-000 Dome ceramic 0200-01006
11830-000 cover ring 0200-09243
11831-000 Baffle inject 0200-01559
11832-000 Liner,Chanber Lower X-Flow 0200-08114
11833-000 Block, Chamber Liner Insert, X-Flow 0200-07892
11834-000 Insert, Slit Valve Tunnel W/Pinning 0200-08002
11835-000 Locking 0200-10702
11836-000 Tip, Shaft, Susceptor Support E2 Chamber 0200-89032
11837-000 Pin, Wafer Lift, Thin Wall SIC. 0200-03201
11838-000 Ring, Slotted Preheat, .15 Thk 0200-03259
11839-000 Susceptor, Pin Lift, Dished Pocket Tapered Ledge 0200-01947
11840-000 Insert, Chamber Exhaust Liner Quartz 0200-07232
11841-000 Pin Locking Chamber Lower Liner 300MM 0200-05117
11842-000 Six Arm Susceptor Support Shaft 0200-05388
11851-000 Window quartz 5mm thick 300mm 0200-07958
11855-000 shield quartz 200mm sputter 0200-09608
11862-000 window 0200-00057
11863-000 COVER WRAPAROUND QTZ OX/MLR/NIT 0200-09346
11873-000 OBS FILTER, INFRA-RED, VIEWPORT 0200-35348
11883-000 Conical Pin 0200-35780
11890-000 150mm shadow ring 0200-39347
11891-000 Plate quartz gas dist upper ASP 0200-09447
11892-000 plate gas lower 150mm 0200-09448
11893-000 ring single ceramic 0200-36687
11894-000 ring single ceramic 150mm low profile 0200-36691
11895-000 ring single low profile 200mm 0200-36685
11897-000 RING, SINGLE, CERAMIC, 145MM SEMI MAJOR FLAT, DPS 0200-35432
11900-000 quartz ring 0200-07524
11901-000 silicon ring collar 300mm 0200-03736
11906-000 Cover Plate, same as ( 10634-000 and 0200-02619) 0200-01271
11908-000 Liner side GDP 0200-02981
11909-000 Top Cap GDP 0200-02980
11910-000 Lower GDP 0200-02273
11911-000 Window 0200-01351-R
11912-000 Isolator ceramic 0200-36609
11913-000 spttter ring 0200-09087
11916-000 Cover Skirt 0200-01993
11918-000 insert ring chamber ceramic 0200-39324
11928-000 Qtz Ring, Upper Liner, Poly 0200-35162
11930-000 Gas Insert 0200-07577
11935-000 Shield Pumping Insert 0200-10164
11936-000 Quartz Shadow Ring 0200-01119
11937-000 Shield L support 0200-09974
11938-000 Screw lid 0200-35611
11939-000 Quartz Shadow Ring 0200-10445
11940-000 Silicon Ring 0200-01509
11941-000 quartz cover outer 8″ step 0200-10041
11942-000 QUARTZ COVER,INNER,8″,NOTCH,STEP3,ESC 0200-10042
11943-000 Pin Wafer 0200-09035
11948-000 insert ring silicon 150mm flat 0200-00417
11950-000 Liner ceramic top 0200-02414
11951-000 liner ceramic middle 0200-02525 0200-14255
11952-000 liner ceramic bottom 300mm 0200-00668 0200-15205
11953-000 lift hoop pin lift fixed floating 0200-03312 0200-08334
11954-000 Focus Ring, Roughened (NEW # IS 10395-020) 0200-09787
11957-000 Gas Distribution Plate, Ceramic 0200-10246
11962-000 ·         DOME CERAMIC DPS CHAMBER 0200-10297
11963-000 Gas Distribution Plate 0200-10246
11966-000 Ring Single 195mm Semi Notch Quartz DPS 0200-05996
11967-000 Pin Wafer 0200-03486
11969-000 GDP same as 10140-000 but fire polish holes 0200-02776
11970-000 cover ring 0200-00925
11973-000 INSULATOR 6” 0200-01173
11979-000 Ring 0200-02835
11981-000 Blade 150mm robot 0200-35910
11990-000 Deposition Ring, Ceramic 0200-05808
11997-000 Collar 150mm Flat 0200-09626
12002-000 insert chamber inlet 5 zone insert 0200-89022
12004-000 Ring Focus Ceramic 0200-39142
12012-000 Susceptor Graphite Pins 0200-00207
12013-000 TPM- Silicon Insert Ring 200MM 0200-01239
12014-000 0200-04647
12015-000 0200-00332
12016-000 Qaurtz Shield 8″ 0200-09082EM
12017-000 Quartz Ring 8″ 0200-09086
12018-000 0200-11072
12019-000 Preheat Ring .125 THK 0200-35081EM
12020-000 Hollow Pin 200MM 0200-36642
12021-000 XL SI Susceptor (Modified) 0200-36726
12022-000 Susceptor 200MM NCP 0200-36727
12023-000 TPM- Cover, QTZ, 8″, Notch (2), HI-TEMP 0200-39297
10142-000 R, Confinement, mod, qtz 716-443090-002
10143-000 ESC Focus ring 150mm 716-249040-001
10144-000 window, fused silica 716-540198-001
10145-000 confinement ring bottom 716-443084-003
10146-000 confinement ring top 716-443083-004
10147-000 confinement ring 716-140236-062
10192-000 Dual Heated Endpoint Window 716-330355-002
10214-000 Plasma Distrn 716-000941-001
10243-000 NOZZEL 8 RDL-1 716-012639-024 REV D
10303-000 End Point Window – 9600 716-330355-001 ENPWQT071
10305-000 Focus Ring – 9600 ICS-716-330190-081-M
10306-000 Filler Ring _ 9600 716-031453-001 Rev E
10427-000 Lift Pin 0200-09716
10447-000 Window 716-011427-001
10448-000 LAM Funnel 716-021323-001
10449-000 LAM Spacer 716-011493-001
10450-000 lam 716-011533-001
10465-000 Quartz Sleeve 716-160255-002
10479-000 double lip flange with opaque disc in middle 716-347266-002
10528-000 Quartz Top Plate 716-331157-022
10536-000 RING, EDGE CERAMIC 716-011651-008
10537-000 FOCUS RING, CERAMIC 716-011830-008
10538-000 CERAMIC DISK 716-028447-002
10539-000 PLUNGER 1/4 TURN(OPS) 716-020931-030 REV B
10540-000 WASHER, CLAMP 9600 716-011571-001
10541-000 CLAMP RETAINER 9600, 1/4 TURN CERAMIC 716-011572-001
10542-000 GAS RING PROTECTION SLEEVE 716-028739-001 REV 2
10543-M12 WAFER CLAMP 716-330973-281(MODIFIED)
10544-000 RING,CLAMP ATTACHMENT 716-011963-003
10558-000 Lower Chamber Ring 716-031453-001 REV E
10561-000 Window heater 716-031052-001
10568-000 Heated end point window 716-031052-002
10572-000 disc quartz 716-028454-012
10620-000 Quartz Window 716-011009-001
10629-000 QUARTZ RETAINING RING 716-140432-061
10828-000 Furnace (Wrong Description) – same as 10448-000 716-021323-002
10904-000 HPT COVER RING .125 716-008645-001
10932-000 EPD Window (also 10303-000) 716-330355-001
10942-000 HOT EDGE RING 716-140163-261
10943-000 CONFINEMENT RING 716-140236-003
10944-000 FOCUS RING 716-140118-001
11175-000 Quartz Top Plate 716-331097-001
11182-000 8” Focus Ring 716-443129-001
11183-000 cover ring 716-008645-003
11211-000 RING , WAP 716-017112-330
11250-000 Bell Jar Sleeve 716-160255-002
11290-000 WDO,GAS INJ,FACE SEAL,QRTZ,NSG 716-012640-012
11291-000 WDO,GAS INJ,FACE SEAL,QRTZ,NSG 716-0122640-011
11293-000 RING,EDGE,BOT,200-300MM 716-026652-002
11387-000 locking ring (DUPICATE 716-017112-330
11524-000 ceramic injector 716-003473-802
11525-000 ceramic ring cap 716-800951-001
11526-000 300mm Ceramic Insulator Disc 716-003481-803
11574-000 Quartz Gas Ring 716-140432-001
11601-000 512 Quartz Disc 716-028485-512
11602-000 Top Wide Edge Ring 716-331142-001
11603-000 Base Edge Ring 716-443179-102
11604-000 High Purity Quartz Disc 716-331157-004
11605-000 Cylindrical Quartz Sleeve (qtz insulator ring) 716-330915-003
11606-000 Upper Quartz Ring 716-140432-002
11607-000 Confinement Ring 716-140236-003
11608-000 Quartz Cover Ring 716-443189-002
11609-000 Upper Quartz Ring (Exelan) 716-443090-010
11610-000 Confinement Ring (Exelan) 716-443230-002
11611-000 Quartz Coupling Ring 716-140169-002
11612-000 Window Tep, Qz 9600 716-330891-002
11720-000 Gas Injector Nozzle, 8-Hole Quartz 716-008718-001-D
11723-000 Ring Edge top 230 716-031257-309
11727-000 ceramic ring 716-024479-003
11729-000 QUARTZ RING 716-803156-004
11731-000 ADPTR FOC Quartz 716-012795-002
11732-000 Baffle CHBR 2300 716-801451-019
11733-000 insulator ring esc tapped 300mm 716-800330-002
11734-000 WDO Quartz Gas inject fire polish 716-801306-004
11735-000 ring filler step dfc 200mm 716-016763-001
11736-000 ring foc stepped dfc 200mm 716-015595-002
11737-000 Ring Wap Quartz Generic 200mm 716-016831-002
11738-000 Ring WAP Twist Top stepped DFC200mm 716-016830-002
11746-000 ring cnfmt cont ramp one pices 716-016394-002
11771-000 TCP window disk top gas 716-331157-014
11772-000 Ring WAP locking ring 716-017112-623
11773-000 Ring Edge top 300mm 716-031257-531
11774-000 ring edge bottom 300mm 716-026652-902
11809-000 quartz esc insulator 716-331099-001
11811-000 edge Ring 716-026652-911
11812-000 edring 716-077262-004
11813-000 Ring edge 6” ceramic 716-030136-001
11845-000 quartz disk 716-028454-512
11846-000 ring hot edge esc 8” 716-140139-211
11847-000 R, edge 716-330045-281
11848-000 plate shower head 716-330892-007
11849-000 r,h edge 716-443086-401
11850-000 ring focus 716-443234-002
11854-000 R, Edge 6 in 1.5mm top Qtz ESC 716-331099-066
11866-000 Cylindrical Ceramic Sleeve 716-330915-001
11885-000 cov, ring quartz 716-013402-003
11898-000 edge 8 es top quartz 716-331088-001
11903-000 ring 716-031257-309-mod
11925-000 Bottom Edge Ring 500669, 716-026652-911
11926-000 Quartz Guard Ring 716-067739-117
11958-000 Ring edge 716-030135-001
12024-000 716-003377-003
12025-000 716-007136-011
12026-000 716-008645-005
12027-000 716-012639-540
12028-000 LAM OEM# 73-30101 716-012640-011
12029-000 Ring H Edge 716-015590-001
12030-000 Ring, H Edge, SI, H N 716-015590-001
12031-000 716-016394-013
12032-000 Ring, WAP, QTZ, Generic, 200MM KK51182 716-016831-007
12033-000 716-028454-715
12034-000 Ring, Edge, Top, 23 716-031257-209
12035-000 Ring Edge, Top, QTZ, EBP, 20 716-031257-521
12036-000 Hot Edge Ring Ceramic, 8″ 716-140139-001
12037-000 Hot Edge Ring 8″ 716-140139-213
12038-000 Hot Edge Ring 716-140163-001
12039-000 Quartz Ring, Upper 716-140432-004
12040-000 Window RF Shaped Rough 716-330121-001
12041-000 Ring, Focus, 8″ ESC Rough 716-330504-081
12042-000 716-331142-201
12043-000 Disc, Interferometer 8″ GE 124 716-331157-015

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